Ammonia Local Scrubber System


  1. It suitable for high efficiency (DRE≧ 95%)ammonia local scrubbing, such as MOCVD.
  2. Compare with the traditional Raschig rings packing, the specific surface area is much more(≧128m2/m3), and it can reduce the liquid-gas ratio and raise the abatement efficiency of wet scrubber.
  3. For hydrophilic inorganic acid/basic substance, the wet film absorption technology can achieve very good abatement efficiency even the concentration of exhaust is low.
  4. Applications: IC semiconductor industry, TFT-LCD industry, LED industry, Semiconductor Solar Cell, etc.