Acid Fume Local Scrubber System
- It suitable for ITO rework, aqua regia mingle, LED surface roughening(LBR), indium corporation washing, and the other process which would exhaust acid fume.
- It doesn’t need to add any chemical to adjust the parameter for inorganic acid fume treatment, but it needs some chemicals additive (e.g. oxidant, reducing agent) for hydrophobic fume treatment.
- There are many users including AUO, EPISTAR, NYPI, C.E.C., PSI, BOE(China), ERI, etc.
- The removal efficiency of Hydrofluoric acid (HF), hydrochloric acid (HCl), sulfuric acid (H2SO4), nitric acid (HNO3), ammonium chloride (NH4Cl) and ammonium fluoride (NH4F) is very good.
- Applications: IC semiconductor industry, TFT-LCD industry, LED industry, etc.