Acid Fume Local Scrubber System


  1. It suitable for ITO rework, aqua regia mingle, LED surface roughening(LBR), indium corporation washing, and the other process which would exhaust acid fume.
  2. It doesn’t need to add any chemical to adjust the parameter for inorganic acid fume treatment, but it needs some chemicals additive (e.g. oxidant, reducing agent) for hydrophobic fume treatment.
  3. There are many users including AUO, EPISTAR, NYPI, C.E.C., PSI, BOE(China), ERI, etc.
  4. The removal efficiency of Hydrofluoric acid (HF), hydrochloric acid (HCl), sulfuric acid (H2SO4), nitric acid (HNO3), ammonium chloride (NH4Cl) and ammonium fluoride (NH4F) is very good.
  5. Applications: IC semiconductor industry, TFT-LCD industry, LED industry, etc.