Arsine Exhaust Adsorptive System


  1. It’s suitable for Ion implantation process and epitaxial process.
  2. The main materials of the adsobent is copper and manganese metal oxide. We use airflow distribution to design the equipment and it can raise the adsorptive efficiency of the arsine exhaust.
  3. Application: IC semiconductor industry, TFT-LCD industry, LED industry.
  4. The efficiency of the adsorbent is excellent on adsorbing AsH3, PH3, BF3, etc.
  5. There are many users including Nexchip(China),CXMT(China), XMC(China) China Resources Microelectronics (China), etc.