Solution

Airborne Molecular Contaminant (AMCs) Treatment Technology

Features:

  1. It meets the requirement of cleanroom PPB level concentration AMCs treatment.
  2. It doesn’t need any chemicals, just use deionized water or city water as absorbing liquid. It comply with the world trend of green environment protection
  3. There are many users of this technology, including TSMC, Qual Comm, Kunshan Sino Silicon Technology Co., Ltd. (SST), AUO (Kunshan), etc. The abatement efficiency of AMCs (NH3, HF, H2SO4, H3PO4, HNO3, etc.) treatment is very good.
  4. The abatement efficiency of ≦1μm fine particles in the air is also very good(≧99%).
  5. The application of this technology is including IC semiconductor industry (Sub- micron and nanometer process), TFT-LCD industry, biotech Industry, etc.
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